PH3601 Fabrication of Micro- and Nano-electronic Devices

Instructor: Lew Wen Siang
Office: SPMS-PAP-03-04
Phone: 6316 2963
Email: wensiang@ntu.edu.sg
Lecture/Tutorial hours : Semester 1 2017/2018 Monday 2.30-3.30 pm, Wednesday 1.30-3.30pm
Lecture Venue: TR+1 (Monday and Wednesday)
Lab Demonstration: Monday 1.30-2.30 pm (Lab 01-01, Lab 05-12, Lab 01-08)

Course Objective:
This course aims to provide student a fundamental understanding of micro- and nano-electronic device fabrication. Students will learn techniques used in semiconductor device processing. The course prepares student for R&D and engineering manufacturing profession in microelectronics industry.

Reference Books:
“Fabrication Engineering at the Micro- and Nanoscale”,  S A Campbell, OUP (2008).
“Silicon VLSI Technology”, J D Plummer et al., Prentice Hall (2000).
“Introduction to Microfabrication”, Sami Franssila, Wiley (2004).
“Fundamentals of Microfabrication and Nanotechnology”, M J Madou, 3rd ed CRC Press(2011).
“Handbook of Semiconductor Manufacturing Technology”, R Doering et al., CRC Press (2008).

Assessment:
Final Examination (60%) - Restricted Openbook
Term Test (10% test 1 + 10% test 2)
Assignment (20 % report + presentation)

Course outline:

Lecture 1             An Overview of Semiconductor Technology
Lecture 2             Contamination Control
Lecture 3             Semiconductor Wafer
Lecture 4             Optical Lithography
Lecture 5             Etching
Lecture 6             Advanced Lithography Techniques
Lecture 7             Impurity Doping
Lecture 8             Thermal Oxidation
Lecture 9             Vacuum Science and Technology
Lecture 10           Physical Vapour Deposition
Lecture 11           Chemical Vapour Deposition
Lecture 12           Metallisation
Lecture 13           Device Metrology
Lecture 14           Device Packaging
Lecture 15           Device Fabrication