X. ZHOU |
© 1997
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$step implant_oxide
diffusion time=20 temp=750 t.final=1000 f.N2=3 f.O2=0.05 diffusion time=5 temp=1000 dryO2 diffusion time=8 temp=1000 f.H2=3 f.O2=1.7 diffusion time=5 temp=1000 dryO2 diffusion time=20 temp=1000 t.final=750 inert $step extr_tox_impl extract oxide thicknes x=4 prefix="tox_imps " suffix="(?) um" out.file=nwell:0_0.ext extract oxide thicknes x=14 prefix="tox_impw " suffix="(0.1) um" out.file=nwell:0_0.ext |