E425: Engineering Design V   TCAD: Process and Device Simulation  

X. ZHOU

© 1997

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  Step 6: Simulated Structure    
 
Step 6: N-well implant: Implant P; Dose: 5x10¹² cm^-2; Energy: 150 KeV.
 

Cross-Sectional View	Input Command
	$step well_implant  implant phos dose=5e12 energy=150   $step extr_Npeak  select z=phosphorus   extract silicon val.extr x=14 maximum prefix="Pmax_well " suffix=" cm**-3"  out.file=nwell:0_0.ext   $step extr_Nsurf  select z=phosphorus   extract silicon val.extr x=14 distance=0 prefix="Psur_well " suffix=" cm**-3"  out.file=nwell:0_0.ext