X. ZHOU |
© 1997
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$step well_implant
implant phos dose=5e12 energy=150 $step extr_Npeak select z=phosphorus extract silicon val.extr x=14 maximum prefix="Pmax_well " suffix=" cm**-3" out.file=nwell:0_0.ext $step extr_Nsurf select z=phosphorus extract silicon val.extr x=14 distance=0 prefix="Psur_well " suffix=" cm**-3" out.file=nwell:0_0.ext |