X. ZHOU |
© 1997
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$step gate_oxide
diffusion time=20 temp=750 t.final=950 f.N2=3 f.O2=0.05 diffusion time=60 temp=950 dryO2 diffusion time=20 temp=950 inert diffusion time=20 temp=950 t.final=750 inert $step extr_tox_gate extract oxide thicknes x=4 prefix="tox_gn " suffix="(0.03) um" out.file=gate_ox:0_0.ext extract oxide thicknes x=14 prefix="tox_gp " suffix="(0.03) um" out.file=gate_ox:0_0.ext |