LYDIA WONGlab

Learning objective
This course is an introduction to advanced materials processing, with focus on micro/nano-electronics. It is essential for students who desire to specialize in microelectronics device fabrication. It also serves as a pre-requisite for the more advanced microelectronics elective modules offered in their fourth year. This subject includes an introduction to fundamental semiconductor operation and device physics. The course covers the basics of semiconductor technology, from bare silicon to finished products. The process steps include bulk crystal growth, oxidation, diffusion, ion implantation, thin film deposition, lithography and etching. Factors that affect the materials’ properties from the process steps will be highlighted. New materials that are incorporated into the state-of-the-art semiconductor processes are also discussed. Advanced techniques in lithography and film deposition are introduced, as well as advanced novel devices.

Content
Microelectronics Technology Overview, Semiconductor Device Physics, Bulk Crystal Growth, Diffusion and Thermal Oxidation, Ion Implantation & Simulation, Thin Film Deposition, Patterning, Advanced Lithography, Advanced Deposition Techniques, Advanced Devices.

Learning Outcome
Upon successful completion of the course, students will be able to:

• Understand the physical/electrical properties and structures of semiconductor materials and various defects generated by unit processes
• Correlate characteristics and qualities of semiconductor thin films to process details and equipment of semiconductor technologies
• Explain typical silicon wafer manufacturing processes, including thermal oxidation, diffusion, ion implantation, physical/ chemical vapour deposition, photolithography, and etching processes
• Work in a wafer fabrication company effectively

Learning objective
The course aims to introduce the concept of energy harnessing and energy storage technology through photovoltaics and batteries. It would teach students the challenges in boosting the efficiency of PV devices through understanding of PV device principles and the factors affecting the PV cell efficiency. The course would also teach students energy storage, supercapacitor and batteries concepts, lithium ion battery technology, essential techniques and technology of batteries/supercapacitors through understanding the underlying kinetics and thermodynamics of electrode processes occurring in various batteries.

Content
Architectures of PV devices, PV device principles, Efficiency improvement in PV devices, Fabrication methods and Application of PV devices, Types of Energy storage, Electrochemical principles in batteries/ supercapacitors, Energetics and kinetics charge storage, Factors affecting battery/ supercapacitor performance, Lithium ion battery technology, Selection/ Applications of supercapacitors /batteries and future trends.

Learning Outcome
On completion of this course, the students should be able to:

• Understand the basic principles of Photovoltaic devices
• Understand the parameters used to assess a PV device performance
• Understand the factors affecting PV devices performance from design and fabrication perspectives
• Understand the similarities and differences between batteries and supercapacitors
• Understand the performance metrics used to evaluate electrochemical energy storage devices
• Understand the principle, operation and prospects of lithium ion battery technology