Wafer bonding
Creation of a strong bond between two materials without intermediate glue
Developed for different materials
- Si-Si : direct
- Si-Glass : anodic
- Si-Au : eutectic
Fabrication of sealed cavities
Propagation of bonding wave in direct Si wafer bonding
(©P. Lecerf - LAAS/CNRS 1999)
Si-Glass bonding for a sealed accelerometer