Bulk micro-machining...

• Well documented process (GEMAC)

• Very high aspect ratio (e.g. 2mm X 500µm X 30µm)

• Easy to implement

• Low cost

• But lacks flexibility in shape (round, small parts)

(© GEMAC 1997)

Anisotropic KOH etching in > Si

> plane

> plane

> plane

 plane

> plane

FC

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