X. ZHOU |
© 1997
|
![]() |
|
|
![]() |
$step P+
s/d_implant
implant boron dose=5e+15 energy=40 $step extr_Npeak select z=boron extract silicon val.extr x=14 maximum prefix="Bmax_psd " suffix=" cm**-3" out.file=psd_impl:0_0.ext $step extr_Nsurf select z=boron extract silicon val.extr x=14 distance=0 prefix="Bsur_psd " suffix=" cm**-3" out.file=psd_impl:0_0.ext $step extr_xj_psd select z=doping extract silicon d.extr x=14 value=0 prefix="xj_psd " suffix="(0.55) um" out.file=psd_impl:0_0.ext |