X. ZHOU |
© 1997
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$step strip_nitride
etch nitride all $step extr_tox_fld extract oxide thicknes x=9 prefix="tox_fld " suffix="(0.65) um" out.file=field_ox:0_0.ext extract oxide thicknes x=4 prefix="tox_padn " suffix="(?) um" out.file=field_ox:0_0.ext extract oxide thicknes x=14 prefix="tox_padp " suffix="(?) um" out.file=field_ox:0_0.ext $step etch_oxide etch oxide thicknes=0.032 |