E425: Engineering Design V   TCAD: Process and Device Simulation  

X. ZHOU

© 1997

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  Step 37: Simulated Structure    
 
Step 37: Metal etch: Etch Al; Strip all photoresist.
 

Cross-Sectional View

Input Command

$step etch_metal  etch aluminum   $step strip_photo  etch photo all   $step print_layers  select z=boron   print.1d x.val=4 layers   select z=doping   print.1d x.val=4 layers   $step extr_Npeak  select z=boron   extract silicon val.extr x=4 maximum prefix="Bmax_nch " suffix=" cm**-3"  out.file=metal:0_0.ext   $step extr_Nsurf  select z=boron   extract silicon val.extr x=4 distance=0 prefix="Bsur_nch " suffix=" cm**-3"  out.file=metal:0_0.ext