E425: Engineering Design V
 
TCAD: Process and Device Simulation
 
X. ZHOU
© 1997

Step-34
Step-36


 
Step 35: Simulated Structure
 
Step-35
 
 
Step 35: Metallization: Deposit Al: 6000 Å.
 
Cross-Sectional View
Input Command
$step deposit_al 
deposit aluminum thick=0.6 spaces=3