Xsim: Unified Regional Approach
to Compact Modeling for Next Generation CMOS
(Invited Paper)
Xing Zhou*, Siau Ben Chiah*, Karthik Chandrasekaran*,
Wangzuo Shangguan*, Guan Huei See*,
Chew Hoe Ang†, Sanford Chu†,
Liang-Choo Hsia†
* School of Electrical & Electronic Engineering, Nanyang Technological
University, Nanyang Avenue, Singapore 639798
† Chartered Semiconductor Manufacturing Ltd, 60 Woodlands Industrial
Park D, Street 2, Singapore 738406
Email: exzhou@ntu.edu.sg
Proc. of the 7th International Conference on
Solid-State and Integrated-Circuit Technology (ICSICT-2004),
Beijing, October 18-21, 2004, pp. 924-929.
Copyright | Abstract
| References | Citation | Reprint
| Back
Copyright Notice
© 2004 IEEE. Personal use of this material is permitted. However,
permission to reprint/republish this material for advertising or promotional
purposes or for creating new collective works for resale or redistribution
to servers or lists, or to reuse any copyrighted component of this work
in other works must be obtained from the IEEE.
Abstract
This paper describes the approaches in the development of Xsim, a unified
regional threshold-voltage-based model for deep-submicron MOSFETs.
In comparison to popular surface-potential-based models, our approach has
the advantages of correlation to technology data, minimum data and one-iteration
extraction, single-piece charge models from accumulation to strong inversion
with extendibility to poly-depletion and strained-Si, as well as selectable
accuracy with the same parameter set.
References
-
[1] N. Arora, MOSFET Models for VLSI Circuit Simulation—Theory and Practice,
Springer-Verlag (1993).
-
[2] Y. Tsividis, Operation and Modeling of the MOS Transistor, McGraw-Hill,
2nd ed. (1999).
-
[3] P. Antognetti and G. Massobrio, Semiconductor Device Modeling with
SPICE, McGraw-Hill (1988).
-
[4] http://www-device.EECS.Berkeley.EDU/~Ebsim3/
-
[5] http://www.semiconductors.philips.com/Philips_Models/mos_models/model9/
-
[6] C. C. Enz, F. Krummenacher, and E. A. Vittoz, J. Analog Integrated
Circuits Signal Processing, 8, 83 (1995).
-
[7] A. I. A. Cunha, M. C. Schneider, and C. Galup-Montoro, Solid-State
Electron., 38, 1945 (1995).
-
[8] H. K. Gummel and K. Singhal, IEEE Trans. Electron Devices, 48, 1585
(2001).
-
[9] J. He, X. Xi. M. Chan, A. Niknejad, and C. Hu, Proc. Nanotech2003,
vol. 2, 262 (2003).
-
[10] G. Gildenblat and T.-L. Chen, Proc. MSM2002, 657 (2002).
-
[11] M. Suetake, K. Suematsu, H. Nagakura, M. Miura-Mattausch, J. H. Mattausch,
S. Kumashiro, T. Yamaguchi, S. Odanaka, and N. Nakayama, Proc. SISPAD2000,
261 (2000).
-
[12] R. van Langevelde, A. J. Scholten, and D. B. M. Klaassen, Proc. Nanotech2004,
vol. 2, 60 (2004).
-
[13] H. C. Pao and C. T. Sah, Solid-State Electron., 9, 927 (1966).
-
[14] C. C. McAndrew and J. J. Victory, IEEE Trans. Electron Devices, 49,
72 (2002).
-
[15] J. R. Brews, Solid-State Electron., 21, 345 (1978).
-
[16] X. Zhou, Proc. MSM2002, 710 (2002).
-
[17] S. B. Chiah, X. Zhou, K. Y. Lim, A. See, and L. Chan, Proc. MSM2002,
750 (2002).
-
[18] X. Zhou, S. B. Chiah, K. Y. Lim, Y. Wang, X. Yu, S. Chwa, A. See,
and L. Chan, Proc. ICSICT-2001, 855 (2001).
-
[19] X. Zhou, S. B. Chiah, Karthik Chandrasekaran, K. Y. Lim, Chan, and
Sanford Chu, Proc. Nanotech2004, vol. 2, 74 (2004).
-
[20] X. Zhou, IEEE Circuits Devices Mag., 19(3), 9 (2003).
-
[21] X. Zhou, K. Y. Lim, and D. Lim, IEEE Trans. Electron Devices, 46,
807 (1999).
-
[22] X. Zhou, K. Y. Lim, and D. Lim, IEEE Trans. Electron Devices, 46,
1492 (1999).
-
[23] X. Zhou, K. Y. Lim, and W. Qian, Solid-State Electron., 45, 507 (2001).
-
[24] K. Y. Lim and X. Zhou, Proc. ICSE, 27 (1998).
-
[25] K. Y. Lim, X. Zhou, D. Lim, Y. Zu, H. M. Ho, K. Loiko, C. K. Lau,
M. S. Tse, and S. C. Choo, Proc. HKEDM, 114 (1998).
-
[26] X. Zhou, K. Y. Lim, and D. Lim, IEEE Trans. Electron Devices, 47,
214 (2000).
-
[27] K. Y. Lim, X. Zhou, and Y. Wang, Proc. MSM2000, 317 (2000).
-
[28] S. B. Chiah, X. Zhou, K. Y. Lim, Y. Wang, A. See, and L. Chan, Proc.
MSM2001, 486 (2001).
-
[29] K. Y. Lim, X. Zhou, and Y. Wang, J. Modeling Simulation Microsys.,
2(1), 51 (2001).
-
[30] S. B. Chiah, X. Zhou, and K. Y. Lim, Proc. Nanotech2003, vol. 2, 338
(2003).
-
[31] X. Zhou and K. Y. Lim, IEEE Trans. Electron Devices, 48, 887 (2001).
-
[32] X. Zhou, S. B. Chiah, and K. Y. Lim, Proc. Nanotech2003, vol. 2, 266
(2003).
-
[33] K. Y. Lim and X. Zhou, IEEE Trans. Electron Devices, 49, 196 (2002).
-
[34] K. Y. Lim and X. Zhou, Solid-State Electron., 45, 193 (2001).
-
[35] K. Y. Lim and X. Zhou, IEEE Trans. Electron Devices, 47, 1300 (2000).
-
[36] K. Y. Lim and X. Zhou, Microelectronics Reliability, 42, 1857 (2002).
-
[37] X. Zhou, S. B. Chiah, and K. Y. Lim, Proc. ISDRS2001, 653 (2001).
-
[38] S. B. Chiah, X. Zhou, K. Chandrasekaran, K. Y. Lim, L. Chan, and S.
Chu, Proc. Nanotech2004, vol. 2, 175 (2004).
-
[39] S. B. Chiah, X. Zhou, K. Y. Lim, L. Chan, and S. Chu, IEEE Electron
Device Lett., 25, 311 (2004).
-
[40] S. B. Chiah, X. Zhou, and K. Y. Lim, Proc. Nanotech2003, vol. 2, 342
(2003).
-
[41] X. Zhou and K. Y. Lim, Solid-State Electron., 46, 769 (2002).
-
[42] S. B. Chiah, et al., submitted for publication.
-
[43] X. Zhou, et al., SRC Review, unpublished (2004).
-
[44] K. Chandrasekaran, X. Zhou, and S. B. Chiah, Proc. Nanotech2004, vol.
2, 179 (2004).
-
[45] K. Chandrasekaran, et al., to be submitted.
Citation
-