Facilities
The Nano Cluster seeks to coordinate, facilitate, and stimulate research in nanotechnology in NTU by grouping together the following centres in NTU:
- Advanced Materials Research Centre (AMRC; MSE/MAE)
- Microelectronics Centre (MEC; EEE)
- Photonics Research Centre (PhRC; EEE)
- Micro-electromechanical Systems (MEMS; MAE)
- Precision Engineering Centre (PEN; MAE)
The AMRC focuses on materials synthesis of both organic and inorganic materials for applications ranging from microelectronics to biomaterials. The microelectronics and photonics research centres focus primarily on micro and nanofabrication as applicable to Si microelectronics, Si/Ge, and compound semicondutors. The MEMS centre focuses on MEMS and NEMS research; whereas the PEN centre will continue to address scaleable manufacturing technologies for nanoscale applications. These will form the platform technologies that will enable and support research in nanotechnologies. Finally, all the nano characterization tools are housed in the FACTS facility which include high resolution TEMs, SEM, and other equipment for atomic level characterization, testing, and simulation.
Major Facilities includes 3 cleanrooms (total net 1,000 sq m, net) for Semiconductor processing, MEMs, Bio/ Organic/ Glass/ Metal fabrication/ processing, Advanced Characterization (TEMs/FIB surface analysis); and advanced materials synthesis.
Links to Research Centers of the Nanoscience & Nanotechnology Cluster:
