MEMS foundry?
Solutions for prototype & small series
- Cronos-MCNC (USA): surface micro-machining (Analog Devices: MEMS + IC)
- MEMSCAP (France): CMOS based
- SensoNor (Norway): Bulk & bonding
- GEMAC (Germany): Bulk micro-machining
- Bosch (Germany): Deep-RIE process
However no solution for packaging currently exists!