MEMS simulation tools

MEMCAD by Microcosm http://www.memcad.com

IntelliSuite by IntelliScience

http://www.intellisense.com

TCAD (Solidis) by ISE http://www.ise.ch

CFD-ACE+MEMS CAD by CFDRC

http://www.cfdrc.com

MEMSCAP by MEMSCAP http://www.memscap.com

MEMS Pro by Tanner http://www.tanner.com/eda

ANSYS V5.6 by ANSYS http://www.ansys.com/

SUGAR by UCB (K. Pister)

http://www-bsac.EECS.Berkeley.EDU/~cfm/

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