A journey in the micro-world of the Micro-Electro-Mechanical Systems (MEMS)
Outline
Reality or Science-Fiction?
Sensors
Ink-jet printer nozzle
Projection display
Optical switch
Biomedical analysis
Material engineering
What is their common point?
MicroSystem Technology
What MEMS is not… yet!
But how did it start?
MEMS market
Evolution of MEMS market
MEMS Actors
MEMS market by segment
Future market by segment
Convinced ?
MEMS from A to Z
An advanced micro-system
Miniaturization
Scaling laws examples
MEMS vs IC design
MEMS simulation
MEMS simulation tools
MEMS simulation tools...
Material constant
Microstructure fabrication
Photolithography
Bulk micro-machining
Bulk micro-machining...
Wafer bonding
Surface micro-machining
Sacrificial layer technology
Multi-layers technology
Deep RIE etching
Silicon MEMS vs IC process
Ubiquitous Silicon?
Electroplating process
LIGA process
Micro-molding
Other fabrication processes
MEMS foundry?
MEMS foundry in Singapore?
System integration
Hybrid integration
Monolithic integration
Monolithic by IC first
Packaging & Test
Summary
Challenges to overcome
Acknowledgment
Other information: Adapted from a presentation done at the Precision Engineering 21st Forum in Singapore (22 March 2000)To view it in the best conditions use at least 800X600 resolution and suppress the unnecessary toolbars in top of the browser.