Implant Dose =
7
x
10
11
|
8
x
10
11
|
9
x
10
11
|
1
x
10
12
|
2
x
10
12
|
3
x
10
12
|
4
x
10
12
|
5
x
10
12
cm
-2
7x1011 |
8x1011 |
9x1011 |
1x1012 |
2x1012 |
3x1012 |
4x1012 |
5x1012 cm-2
