X. ZHOU |
© 1997
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$step N+
s/d_implant
implant arsenic dose=5e+15 energy=130 gaussian $step extr_Npeak select z=arsenic extract silicon val.extr x=4 maximum prefix="Amax_nsdi " suffix=" cm**-3" out.file=nsd_impl:0_0.ext $step extr_Nsurf select z=arsenic extract silicon val.extr x=4 distance=0 prefix="Asur_nsdi " suffix=" cm**-3" out.file=nsd_impl:0_0.ext $step extr_xj_nsd select z=doping extract silicon d.extr x=4 value=0 prefix="xj_nsdi " suffix="(0.2) um" out.file=nsd_impl:0_0.ext |