E425: Engineering Design V   TCAD: Process and Device Simulation  

X. ZHOU

© 1997

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  The Virtual Wafer Fab Technology for the Deep-Submicron ULSI Era   Xing Zhou   School of Electrical and Electronic Engineering Nanyang Technological University Singapore    
Contents

INTRODUCTION
Spectrum of Approaches to Analyzing Microelectronic Systems
VLSI Design and Manufacturing Hierarchy
Multi-Level Representation
Layout + Process = Chip
New Technology Development
The Microelectronics Industry

VIRTUAL WAFER FAB
Chip Design and Wafer Fabrication
Virtual Wafer Fab
Multi-Variable Design Space, Multi-Target Optimization
Process and Device Database
Projection and Contour Plots
Conceptual Database

 

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