Technology
& Engineering Research Programme (1999)
Title
Semiconductor Process/Device Simulation with TCAD
Students
Chong En Ling (ACJC)
Samvita R Padukone (NJC)
Abstract
Technology computer-aided design (TCAD) tools have become increasingly
popular in aiding new semiconductor technology development. In this
project, a simple semiconductor junction diode will be virtually “fabricated”
and characterized using TCAD tools. The students will gain practical
experience and knowledge in visualizing semiconductor device fabrication
and operation.
Objectives
Exposure to modern semiconductor fabrication processes and devices through
a simple example (diode)
Practical experience in the state-of-the-art computer simulation tools
to emulate simplified physical phenomena
Knowledge in design of experiment (DOE), modeling, and data analysis
Motivation in carrying out research
Scope
Reading on general semiconductor processes (such as implantation, diffusion,
etc.) and device characterization (such as I-V, C-V, etc.)
Familiarization with the TCAD tools (such as DOE tool, process and device
simulators)
Virtual wafer fabrication (VWF) — simulate the fabrication process of a
simple junction diode
Virtual device characterization (VDC) — simulate the electrical (I-V) characteristics
of the “fabricated” diode
Study on the target–variable dependency
Methodology
Design conceptualization — identify the major target parameters and process
variables
Design implementation — implement the design to obtain the required target–variable
dependency
Numerical simulation — run process and device simulation
Data analysis — analyze and understand the simulated data
Physical modeling — extract physical model parameters from the simulated
device
Tasks
Study the basic diode equation and its I-V characteristics
Understand the basic process steps to fabricate the diode
Identify the design targets (turn-on voltage, leakage current, ideality
factor) and variables (implant dose and energy, diffusion time and temperature,
substrate doping)
Design and implement the experiment through DOE and numerical simulation
(major task)
Obtain the target–variable relationship by graphical plots
