E425: Engineering Design V
 
TCAD: Process and Device Simulation
 
X. ZHOU
© 1997

Step-12
Step-14


 
Step 13: Simulated Structure
 
Step-13
 
 
Step 13: Field implant photolithography: Mask: NWELL; Deposit negative photoresist; Masking; Exposure; Development.
 
Cross-Sectional View
Input Command
$step pfield_mask 
deposit negative photo thick=1  
expose mask=NWELL  
develop