Research Facilities

Hardware

Fabrication

• MicroFabrication Laboratory - 330 sq.m. Class 100 cleanroom c/w necessary in-house supporting facilities with complete 6" silicon wafer processing capability (support 4" and some 8" wafer processing as well)
• Thermal processing furnaces including oxidation/diffusion
• LPCVD thin film deposition
• Varian medium current ion implanter
• Multi-chamber cluster-tool for PVD and PECVD
• Silicon and SiGe epitaxy
• Plating deposition for multilevel metallization
• Etching - Plasma etchers; plasma photoresist stripping  system; CMP processing
• Lithography - Canon PLA601 contact aligner; OAI contact aligner; Karl Suss MA-6 aligner; AIO resist spin-coat/develop system

• Metrology
• Resistivity mapping system
• Veeco Dektak surface profiler
• Leica thin film thickness measurement system
• LEO 1550 FE-SEM
• Bio-Rad FTIR
• Tencor stress measurement system
• ADE wafer thickness measurement system
• CD measurement system
• I-V/C-V
• Karl Suss probing station
• HP 4155 semiconductor parametric analyzer
• Keithley CV measurement system

• Networked SUN workstations in 3 IC design labs
• SUN E450 Server - 4x400 Mhz CPU 2GB RAM , 8x18GB Harddisk
• Ultra 60 - 3
• Ultra 10 - 23
• Ultra 5 - 15
• Ultra 2 - 2
• Ultra 1 - 37
• 6x4GB + 4x36GB Harddisk (for DOUST/TCAD)

ECAD

• Cadence
• Analog Artist Design Environment, Analog Artist Statistical Analysis, Virtuoso Interface CCT IC Craftsman, Clock Tree Generator for Silicon Ensemble, Composer, Diva/iLVS/iDRC/iLPE, Dracula III Advanced Bundle (DRC/ERC/LVS/LPE) IC, HSPICE Interface, IC Craftman - Virtuoso I/F, Journeyman CCT IC Craftman, Leapfrog VHDL Simulator IC, Mixed-Signal Back Annotation Interface, Pearl Full Custom IC, Physical Design Planner HLDS, Silicon Ensemble DSM IC, Spectre Advanced Circuit Simulator / RF Option, Stream to/from Cadence, Substrate Coupling Analysis, Verilog-XL, VHDL Model Import Option for Verilog-XL, Virtuoso Layout Editor
• Mentor Graphics
• Accusim II, Autologic Block, Autologic HDL-VHDL, Autologic Optimizer, Autotherm, Board Stn, Design Architect, Falcon Framework, Hybrid Stn, IC Layout Ex Stn, Quickfault II, QuickGrade II, Quickpath, QuickSim II, QuickHDL-VHDL, QuickHDL-Pro, WorkXpert
• Hewlett Packard
• RFIC/RF Board Design Stations - Design Environment, Linear/NonLinear Simulators, Circuit Envelope Simulator, Statistical Design, RF Passive Circuits/System Models, RF Passive SMTTransistor Library, Multilayer Interconnect Models, Momentum EM Simulator Engine, Layout, High Frequency SPICE, Convolution Simulator, Spice Model Generator, GDSII Translator, Spice Netlist Translator, High Frequency Structure Simulator, HFSS Optimization Add-on NLS, HPtolemy Fixed point Analysis, HPtolemy Simulator, HPtolemy Matrix Model, Digital Filter
• ADS (Agilent)
• IC-CAP
• Synopsys
• Behavioral Compiler, COSSAP, Cyclone, DC-Expert, DesignAnalyzer, DesignCompiler, DesignTime, DesignWare, ECO-Compiler, FPGA-Compiler, FPGA-Library-Compiler, Floorplan Manager, HDL-Compiler, Library-Compiler, MCE-Lib, Power-Optimization, PrimeTime, Protocol-Compiler, RTL-Analyzer, Test-Compiler, Test-Library, TestManager, TestSim, VHDL-Compiler, VSS
• StarHspice, StarSim, Libra-Passport 0.35 micron & 0.6 micron Library

• Full suite of Synopsys (Avant!/TMA) TCAD tools running on >20 networked Ultra Sparc workstations
• TMA WorkBench (TWB) - 18 licenses
• TSUPREM-4 - 42 licenses (with EDAAM - 3 licenses)
• MEDICI - 42 licenses (with AM, LT, HJ, TC, PD, OD, CA AAMs - 3 licenses each)
• DAVINCI - 3 licenses (with LT, HJ, TC, PD AAMs - 3 licenses each)
• AURORA - 18 licenses (with SPAAM - 3 licenses)
• TMA LAYOUT - 30 licenses
• MICHELANGELO - 36 licenses
• DEPICT - 3 licenses
• TERRAIN - 3 licenses
• TAURUS VISUAL - 30 licenses
• TAURUS TOPOGRAPHY - 3 licenses
• TAURUS LITHOGRAPHY - 3 licenses