A Universal Nanopositioning Platform for Nanomanufacturing and Nanometrology
IV-1: A Universal Nanopositioning Platform for Nanomanufacturing and Nanometrology |
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Chen I-Ming and Yeh Hsien-Chi |
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Abstract |
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Nanopositioning is the essential and fundamental element of nanomanufacturing and nanometrology. In order to overcome the bottlenecks that so far we meet on nanopositioning, we would develop a universal positioning platform that is capable of having long travel ranges along three axes, nanometer precision, and real-time calibration. Figure (1) shows the organization chart of the technical elements that would be developed and used to construct a complete nanopositioning platform for nanomanufacturing and nanometrology.
The outcomes of this project will underpin the next generation of ultra-precision manufacturing. Meanwhile, these novel nano-sensors and nano-actuators could also be applied for scientific research and industrial applications. |
