Development of carbon-based NEMS

II-6: Diamond-like amorphous Carbon (DLC) for Nano and Micro systems

B.K. Tay, School of EEE, NTU J.M. Miao, School of MPE, NTU H.C. Chua, Engineering Department, Cambridge University

Abstract

Our previous works on stress reduction of diamond-like carbon (DLC) films by Filtered Cathodic Vacuum Arc (FCVA) technique are reviewed. Relevant scientific issues and challenges in using such making such carbon based micro systems are also addressed. Here we report it is possible to deposit and fabricate low stress a-C film microcantilever arrays with high potential for use as bio-sensors. We also demonstrate successful scaling of such films to high yield fabrication of two-dimensional 25nm thick free-standing microbridges with exceptional high strength. Future works involving the nano-dimensions strain gradient plasticity study (science) and nanoresonator (technology) are also discussed.