Bio-ferroics sensor arrays based on NEMS platform

II-4: Bio-ferroics Sensor Arrays Based on NEMS Platform

1: Tan Ooi Kiang and Zhu Weiguang
2: Miao Jianmin
3: Yao Xi

  1. Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798
  2. Micromachines Center, School of Mechanical and Production Engineering, Technological University, Singapore 639798
  3. Electronic Materials Research Laboratory, Xi’an Jiao Tong University, Xi’an 710049, China

Abstract
Research activities in ferroelectric thin and thick films and their related FeRAM, sensors, actuators and electronic devices have been extensively carried out at the Microelectronics Center for over a decade, and many excellent research results have been obtained and recognized. For example, with collaboration, joint effect and closely working together piezoelectric MEMS transducer arrays have been successfully designed, fabricated using our patented film-on-silicon processing technology, and characterized in the last few years, such piezoelectric MEMS transducer arrays have a high sound beam directionality and very strong sound-pressure-level over 120 dB, making it be very suitable for ultrasonic instruments in medical applications and the miniaturization of the home ultrasonic system be feasible and achievable. Very recently in our another research project, ferroelectric film sensor has several orders higher sensitivity over the conventional methods to detect nose-cancer molecules. This team brings their very outstanding expertise in ferroelectric films and materials, sensors, actuators, MEMS and NEMS micromachining, circuitry design and integration, electronic devices, etc. Novel ideas have been identified on NEMS bio-ferroics sensor arrays for the bio-molecular sensing and detection.