RESEARCH The research facilities of Microelectronics Centre include one Class 10-10,000 Clean Room for multi-disciplinary research, a 330m 2 Class 100 Clean Room for silicon-based microfabrication and a class 100 Clean Room for compound semiconductor technology, and advanced laboratories such as Sensors & Actuators laboratory, Materials Characterization laboratory, Nanaolectroncis Laboratory, IC Design and CAD/CAM laboratory. The Centre has complete facilities for the fabrication of compound semiconductor and a wide range of other semiconductor and non-semiconductor thin film devices, sensors and circuits. The facilities include equipment for molecular beam and liquid phase epitaxy, vacuum evaporation and sputtering, wet and dry etching, lithography, chemical vapour deposition with electron cyclotron resonance and microwave sources and deposition systems using the filtered cathodic vacuum arc technique. Advanced research work in silicon processes and devices is carried out in the Microfabrication laboratory. This includes the development of low power CMOS, BiCMOS, SiGe and SOI technologies to support the research effort in integrated circuit design, especially for sensors and sensor interface circuits. The processing facility is supplemented by a number of laboratories which house equipment for optical, structural and surface characterization of materials, testing of high-frequency devices and circuits, measurement of photonic devices and systems and characterization of sensor materials and devices. Circuit design and simulation are accomplished using an extensive network of computer-aided design tools, based on which a variety of device simulation and process modelling software for different applications are developed. The key areas of research are: 3. MEMS, Integrated Micro/Nano Devices & Systems, and Smart Material 4. Compund Semiconductor and Quantum Information 5. Computational Nanoelectronics These research programmes are organised into research groups with a total staff strength of ~100, including a number of research fellows, postdoctoral fellows, research engineers, and project officers. There are more than 100 postgraduate research students who are registered for MEng or PhD degrees. There are also a number of technical staff members supporting the research activities in the Centre at various levels and capacity.
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