Course Outline Lecture Notes Design Exercise Relevant Links Link to EE4613 (E425/E422/E411/EE4611) TCAD links 0.18-µm data   Design Exercise Sub-group report: submit to Nanoelectronics Design Lab (or by email - for part-time students) Due: Friday, 9 Nov 2007 Note: 15 Oct swapped with break week

0.25-µm CMOS Process Flow WorkBench flow Layout Cross-sectional views RunTable I-V characteristics Vt-Lg characteristics References S. Wolf, Silicon Processing for the VLSI Era, Vol 3: The Submicron MOSFET, Lattice Press, 1995. Y. Tsividis, Operation and Modeling of the MOS Transistor, 2nd ed, McGraw-Hill, 1999. Online book by Zeghbroeck (Chap. 6)   Threshold voltage definition (References:   )   MOS equation   Short-channel effects